SNE ALPHA
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SNE 4500M
High resolution Table-top SEM (x100K)
I Performance
| Resolution | Magnification | SE Image |
| 5nm | 100.000x | SE Image |
1. Cost-effective Table-top SEM with Max. 100,000x of magnification by miniaturizing modules.
2. Able to scan iamges with high resolution of 5nm by installation of variable aperture with ease of use
- SE (Secondary Electron): Create images with the height level informaiton. Mostly used for surface inspection
II. Convenience
| Stage System | Auto Setting | Simple S/W |
| X,Y,Z,R,T (5-axis) Beam Shift: 150μm |
Focus, Contrast, Brightness | Convenient Operation |
1. The only Table-top SEM of which has 5-axis, enables simple and easy operation with unlimited movement of stage and mouse control system
2. Able to get various analysis results with various scan modes measurement tool
|
1. X-ray tube |
Max 30kV |
|
2. Resolution |
5nm |
|
3. Magnification |
20x – 100.000x |
|
4. Detector |
SE (Secondary) BSE (Primary) |
|
5. X-ray Source |
Tungsten filament |
|
6. Aperture Type |
30, 50, 50, 100 µm |
|
7. Display mode |
2560x1920 |
|
8. Stage |
X: 40mm, Y:40mm, R: 360, Z: 0 – 40mm, T: 0 - 45 độ. Manual |
|
9. Sample size |
80mm/35mm |
|
10. Vacuum mode |
High vacuum only |
|
11. Scanning time |
180 seconds |
|
12. EDS system |
Bruker, Oxford – Britain |
|
13. Dimension |
390 x 737 x 590 (110kg) |
